Physics of Technological Processes & Design of Microsystems

Course developed by: Mario Casu, (POLITO) Polytechnic University of Turin
Contact: mario.casunoSpam@polito.it

Course Description

The deepening on technologies at the micro and nano-scale is the basis for the design and manufacture of microelectronic devices, microsensors, microfluidics and for the conception of new nanostructured devices. Technological processes, therefore, represent a fundamental know-how for both the electronic and the nanotechnology engineer.
In this framework, the "Physics of technological process" course provides the theoretical foundation to be exploited in the study of materials, technologies and design for the manufacturing of microelectronic devices, micro and nanostructures, microsystems and MEMS/NEMS (micro/nano-electro-mechanical systems), with particular emphasis on applications in the ICT area.

To this aim, particular emphasis will be devoted to providing a comprehensive overview of full process flows and to providing the student with the minimal tools to allow him to evaluate different materials and different technological processes so as to select the best-suited combination for different devices and applications.
This course plays a central role in the development of an engineering expert in micro and nanotechnologies, since it extensively provides the basic elements for the fabrication and design of the above-mentioned devices, and it is preparatory for the understanding of subsequent courses of the Master's Degree.
In the course on the fundamentals of technologies and materials for microelectronics and microsystems, and some examples of the same are treated and discussed, thus making the course specifically addressed to those students interested in the fabrication and design aspects of micro and nano-scale devices.

Learning Objectives

• Use of CAD tools for MEMS modeling, analysis and optimisation;
• MEMS design basics and methodologies;
• Professional approach to the design of MEMS-based applications;
• Development of knowledge over different physical domains, other then electrical one (as mechanical, thermal, magnetic, optic, fluidic, ...) and in particular the skill of connecting them together for implementing transduction systems (sensors and actuators for example), and then interfacing and integrating the different parts; 
• Ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, simulation and implementation of microsystems also applied to new or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...); 
• Ability to integrate technical knowledge and to manage the complexity of MEMS design, evaluating its quality and robustness, its implementation and feasibility, choosing the most efficient solutions from the available options; 
• Ability to communicate in a clear and unambiguous way technical aspects relating to the design of microsystems, both in writing and oral form and to both specialists and non-specialists; 
• Development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies for microsystems, not necessarily explained and described during the course.