Microelectromechanical Systems
Course developed by: Angel Rodriguez Martinez, Electronic Engineering Dept, UPC
Contact: angel.rodriguez@upc.edu
Course Description
This course introduces the general principles and tools of the microelectromechanical systems (MEMS) and devices and its applications
The course covers principled such as force scaling, elasticity, piezo-resistance and piezoelectricity, electrostatic actuation and sensing, and then describes several solutions for different applications, such as resonators, inertial sensors, microfluidics and electro-kinetics, RF-MEMS. The last topic describes the specific fabrication processes for MEMS, with particular attention to sustainability in MEMS cycle of life.
Learning Objectives
By the end of this course, students are able to …
- Understand the general principles and tools of the microelectromechanical systems and devices and its applications.
- Propose, plan and develop MEMS devices and applications.
- Understand multiple-domain problems: thermal, fluidic, mechanical and electrical
- Design a fabrication process of a MEMS device
Course access (restricted to UPC enrolled students only)
Open access provided? No
Course duration: ~ 125 hours
Course type: In-class course
Target audience: Students at Masters level
Course language: English
Is this course free? No
Self-paced course? No
Is the certificate / are the credentials free? No
Assessment type: Exams, labs