Electron Probe Microanalyser (EPMA), Jeol JXA8200 "Superprobe"

EMPA enables high magnification and high resolution imaging at the micron scale and quantitative spot analyses of solid materials (elements from B to U). Quantification is based on the comparison of X-ray intensities from the sample with standards of known composition. It is a non-destructive analytical method. The typical volume of spot analysis varies from 1 - 3 μm. Additionally, line traverses and elemental maps can be produced.

The microprobe is installed at the Department of Applied Geological Sciences and Geophysics, Montan University of Leoben and belongs to a consortium that comprises the following three universities: Graz University of Technology, Karl Franzens University of Graz and Montan University of Leoben.


  • 5 wavelength dispersive spectrometers (WDS)
  • Energy dispersive spectrometer (EDS)
  • Tungsten (W) electron gun
  • Backscatter electron (BSE) imaging
  • Secondary electron (SE) imaging  Cathodoluminescence (CL)