Technical specifications table

 

HR

XL

General specifications

 

 

Maximum sample size (ØxH)

550 × 700 mm

800 × 1150 mm

Maximum Source-Detector-Distance

720 mm

1970 mm

Maximum temporal resolution

< 10 seconds/ 360˚ rotation

< 10 seconds/ 360˚ rotation

Spatial resolution

600 nm

3 µm ( < 4 µm in 3D)

 

 

 

X-ray tubes

 

 

 

Open-type Nanofocus 

Open-type Microfocus 

 

Transmission

Reflection

Accelerating voltage / Accelerating voltage

20-160 kV / 50 W

30-180 kV / 300 W

Cooling

Water

Water

 

 

 

Detector

 

 

 

CMOs

amorphous Si flat panel

Pixel matrix

1920 × 3024

2856 × 2856

Active area

145 × 228 mm

428.4 × 428.4 mm

Frame rate (without binning)

26 fps

14 fps

Dynamic range

16 bits

16 bits

Binning geometries

3

14

 

 

 

Mechanical specifications

 

 

Motorization

10

9

Available space around the sample stage

720 × 785 × 710 mm

1970 × 1200 × 1160 mm

Cabinet dimensions (W × L × H)

1050 × 2100 × 2000 mm

1580 × 3500 × 2150 mm

Weight

2950 kg

6550 kg


Scanning modes

  1. stop and shoot – Stop and shoot for each 2D projection (time consuming)
  2. Smooth scan - Scan scheme, without stopping the stage for each 2D projection during the scan (no “stop and shoot”). In combination with the “continuous scan”, best for in situ or fast scans.
  3. Continuous scan - Scan, without stopping at 360° - TESCAN XRE specialty, in combination with “smooth scan” best for in situ or fast scans.
  4. VOIS (Volume-Of-Interest-Scan) - By drawing a VOI into the 3D overview scan result, the system will automatically move the stage to the selected position, to perform a higher resolution scans of the interesting volume.
  5. STAMIA (Stacked and Merged Image Acquisition) – Scan vertically stacked samples or samples up to 1 meter in height and merge the results to one overview.
  6. Detector tiling - All detectors are placed on a high precision motorized translation stage perpendicular to the optical axis (y-direction). This enables detector tiling and virtually increases the surface area of the detector, enhancing the FOV (~ twice).
  7. Helical Scan – Good for planar defects in elongated samples.
  8. Batch scanning - Multiple samples can be placed together on the rotational stage and these samples can be scanned consecutively, without user interaction for each sample.
  9. User defined – The software can be set up with user defined scan protocols. All components are motorized and controllable via the SW. Batch scans of all combinations of scan modes above can be also done.
Tescan
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