We are especially happy to host the Christian Doppler Laboratory for the Direct Fabrication of 3D Nano-Probes (DEFINE) under the leadership of Harald Plank in the course of the upcoming years.
During the last decades, Focused Electron Beam Induced Deposition (FEBID) has attracted increasing attention in fundamental and applied research. This technology enables flexible additive manufacturing thanks to the mask-less, direct-write character for 3D fabrication on the nanoscale, which meet challenges when classical, resist based lithography methods run into their intrinsic limitations. In the course of the past ten years, Harald Plank has intensively been focusing on this topic. In 2015 he defended his Habilitation thesis where he summarised the scientific contribution to this field made at our Institute since 2008; deep insights into fundamental resolution limitations, proximity based broadening effects, high-fidelity shapes, and efficiency aspects have been gained which led to a strong performance improvement in this field.
Ass.Prof. Harald Plank ©Lunghammer - TU Graz
Christian Doppler Laboratory DEFINE
Ass.Prof. Priv.-Doz. DI Dr.techn. Harald PLANK
8010 Graz, Austria
Phone: +43 (0) 316/873-8821